| 摘要 |
PROBLEM TO BE SOLVED: To prevent metallic contamination during process while assuring mechanical strength and cooling performance. SOLUTION: An adapter 60 provided to section between an outer tube 34 and an inner tube 35 is formed of silica glass, and O-rings 67 and 68 are contained in O-ring grooves 65 and 66 formed in the upper and lower surfaces of the adapter 60. Outer parts of the O-ring grooves 65 and 66 are formed of metal retainers 61 and 62 which are coupled thermally with a cooling water passage 53 via metal flanges 51 and 52. Since generation of metal contaminants from the adapter can be prevented by forming the adapter of silica glass, metallic contamination can be prevented during process. Since an O-ring can be cooled with sufficient thermal efficiency by bringing the O-ring into direct contact with a metal retainer, thermal impairment of the O-ring can be prevented. COPYRIGHT: (C)2009,JPO&INPIT
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