| 摘要 |
PROBLEM TO BE SOLVED: To provide a machining device such as a cutting device in which water intruding into an air supply passage for supplying air to an air bearing or the like is detected. SOLUTION: This machining device comprises a chuck table for holding a workpiece, a machining means for machining the workpiece held on the chuck table, and an air supply source for supplying air to the required portions of the machining means through a communication passage. A detector for detecting the intrusion of water is disposed in the communication passage. For example, the machining means involves an air bearing freely rotatably supporting a spindle by air, and the required portions are formed of the air bearing. COPYRIGHT: (C)2009,JPO&INPIT
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