| 摘要 |
PROBLEM TO BE SOLVED: To provide a charge removal/dedusting technique which can advantageously materialize the removal of static electricity and foreign matter including dust from the whole surface of an object to be treated and the prevention of the re-adhesion of the removed foreign matter to the object. SOLUTION: A plurality of spray heads 13 which spray ions with gas on the object are arranged to be separated at a prescribed distance from each other. A movement means 12 is provided which moves at least one of the spray heads 13 and the object 10 to make the object 10 pass through the spray heads 13. Moreover, the gas is ejected from the spray heads 13 inward in the separation direction of the spray heads 13 and toward the front side in the movement direction of the spray heads 13 or the rear side in the movement direction of the object. COPYRIGHT: (C)2009,JPO&INPIT
|
