SURFACE-MODIFIED MESOPOROUS SILICA, SLURRY COMPOSITION FOR ADDITION TO RESIN USING THE SAME, FILLER FOR RESIN, RESIN COMPOSITION, ELECTRONIC COMPONENT FOR HIGH FREQUENCY AND SUBSTRATE FOR HIGH FREQUENCY CIRCUIT

摘要

PROBLEM TO BE SOLVED: To provide surface-modified mesoporous silica which has a silanol group on the surface of mesoporous silica being satisfactorily modified, and accordingly has a low dielectric constant, a slurry composition for addition to a resin using it, a filler for a resin and a resin composition. SOLUTION: The silanol group existing on the surface of the mesoporous silica having a pore diameter of 1.5 nm or more is chemically modified with a hydrophobic functional group. As the average pore diameter of the mesoporous silica is 1.5 nm or more and is large, a reagent for chemical modification enters into the pore easily, a modification rate of the chemical modification with a hydrophobic functional group becomes high and it contributes to the effect lowering dielectric constant at the inside of the pore. COPYRIGHT: (C)2009,JPO&INPIT