发明名称 METHOD FOR FORMING AN ELECTRICAL STRUCTURE COMPRISING MULTIPLE PHOTOSENSITIVE MATERIALS
摘要 An electrical structure and method of forming. The method comprises providing a substrate structure. A first layer comprising a first photosensitive material having a first polarity is formed over and in contact with the substrate structure. A second layer comprising photosensitive material having a second polarity is formed over and in contact with the first layer. The first polarity comprises an opposite polarity as the second polarity. Portions of the first and second layers are simultaneously exposed to a photo exposure light source. The portions of the first and second layers are developed such that structures are formed.
申请公布号 US2009130599(A1) 申请公布日期 2009.05.21
申请号 US20070942753 申请日期 2007.11.20
申请人 发明人 DAUBENSPECK TIMOTHY HARRISON;GAMBINO JEFFREY PETER;MUZZY CHRISTOPHER DAVID;SAUTER WOLFGANG
分类号 G03F7/26 主分类号 G03F7/26
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