| 摘要 |
A chiller for etching equipment for processing a semiconductor includes: a chuck for controlling a temperature of a semiconductor wafer, a coolant pipeline connected to the chuck, a coolant tank connected to the coolant pipeline, an evaporator in the coolant tank, a refrigerant in the evaporator, a compressor for compressing refrigerant flowing from the evaporator, a condenser for condensing the compressed refrigerant from the compressor, and an electronically controlled expansion valve connected to the condenser to receive compressed refrigerant, and connected to the evaporator for feeding the expanded refrigerant into evaporator.
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