LITHOGRAPHIC APPARATUS AND METHOD

摘要

PROBLEM TO BE SOLVED: To provide a substrate carrier which copes with various shapes and sizes of a substrate.

SOLUTION: A substrate carrier WC arranged to hold a substrate in a predetermined position is disclosed. The substrate carrier has a transparent region 2 that extends through the substrate carrier from the side of the substrate carrier on which the substrate is held to the opposite side of the substrate carrier, the transparent region is formed of glass, and substantially transparent to a signal used to determine a position of an edge of the substrate on the substrate carrier.

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