| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe device capable of promptly, as well as, efficiently performing probe inspection. SOLUTION: The probe device which inspects a plurality of inspected bodies arranged on a wafer-like substrate, is equipped with a prober chamber: an X-Y stage 12 which is arranged in the prober chamber, forms first frame structure, and has a first space in its center; a substrate fixation mechanism 23 which is arranged on the X-Y stage 12, forms second frame structure, and has a second space connected to the first space at its center; a probe card 14 which is arranged opposite to the wafer-like substrate in the prober chamber and has a plurality of probes; a probing stage lifting mechanism 24 arranged in the first space; and a probing stage 3 which is attached to the probing stage lifting mechanism 24 and comes into contact with the bottom surface of the substrate to support the substrate from downward, when it is lifted by the probing stage lifting mechanism 24. COPYRIGHT: (C)2009,JPO&INPIT
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