| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a transparent conductive film used for a liquid crystal display, electroluminescent display device, anti-static conductive film coating, gas sensor, solar battery or the like, and a sputtering target for forming the transparent conductive film. <P>SOLUTION: The transparent conductive film is made of zinc oxide with Ce:0.2 to 5 atom% doped, and further, with Al doped at Al:0.005 to 0.5 atom% so that an Al dope volume is smaller than a Ce dope volume, and carbon contained in the transparent conductive film as inevitable impurities is limited to 40 ppm or less. <P>COPYRIGHT: (C)2009,JPO&INPIT |
