发明名称 Surface-Emitting Laser Diode and Method of Manufacturing the Same
摘要 A surface-emitting laser diode capable of being manufactured easily at low cost, and capable of stabilizing the polarization direction of laser light in one direction and achieving higher output is provided. A light emission section 20 in which a lower first DBR mirror layer 12, a lower second DBR mirror layer 13, a lower spacer layer 14, an active layer 15 including a light emission region 15A, an upper spacer layer 16, a current confinement layer 17, an upper DBR mirror layer 18 and a contact layer 19 are laminated in this order is included on a substrate 10. The lower first DBR mirror layer 12 includes an oxidation section 30 nonuniformly distributed in a direction rotating around the light emission region 15A in a periphery of a region corresponding to the light emission region 15A. The oxidation section 30 includes a pair of multilayer films 31 and 32, and is formed by oxidizing a low refractive index layer 12A. Thereby, an anisotropic stress according to nonuniform distributions of the multilayer films 31 and 32 is generated in the active layer 15.
申请公布号 US2009129417(A1) 申请公布日期 2009.05.21
申请号 US20070227443 申请日期 2007.06.04
申请人 SONY CORPORATION 发明人 MAEDA OSAMU;SHIOZAKI MASAKI;YAMAGUCHI NORIHIKO;YAMAUCHI YOSHINORI
分类号 H01S5/18;H01L21/02 主分类号 H01S5/18
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