发明名称 APPARATUS AND METHOD FOR APPEARANCE INSPECTION
摘要 PROBLEM TO BE SOLVED: To provide an apparatus and method for appearance inspection which, when images of an object of inspection held in a pocket of a tray are taken in a plurality of segmented shooting fields of view, can inspect the images highly precisely without positioning the object of inspection. SOLUTION: Posture information calculated through positioning processing by a posture detecting section 56 is outputted to a movement control section 59, and the movement control section 59 determines, in accordance with the posture information, the shooting positions of all shooting fields of view 8 including a second shooting field of view 82 and its subsequent shooting fields of view. Further, the posture information calculated by the posture detecting section 56 is also outputted to an image processing section 57, and the image processing section 57 extracts a first area A from an image as an inspection area in accordance with the posture information and corrects the inclination of the first area A. The first area A, extracted from the image by the image processing section 57, whose inclination has been corrected by the image processing section 57 is inspected by an inspecting section 58. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009109505(A) 申请公布日期 2009.05.21
申请号 JP20080310693 申请日期 2008.12.05
申请人 NEC CORP 发明人 UENO YOSHINORI;NAGAO MASAHIKO;WAKATAKE SHINICHI
分类号 G01N21/956;G01B11/24;G01B11/26;G06T1/00;H01L21/66 主分类号 G01N21/956
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