| 摘要 |
PROBLEM TO BE SOLVED: To provide a slide-type semi-levitation guiding device of which the space between a mobile member and a supporting member is left a predetermined clearance. SOLUTION: A guide part 21 used for guiding the movable member 1 of the slide-type semi-levitation guiding device is formed and extended in the movement direction of the supporting member 2. Then a lubricant is supplied to the space between the movable member 1 and the top surface 21a of the guide part 21 through the medium of a nozzle, and the movable member 1 is supported to the guide part 21 in a semi-levitation state. A back guide surface 21b facing downward is formed and extended in the guide part 21 in the slide direction, and at least three static pressure pockets 15 are provided on the opposed surface 12a of a back board 12 fixed to the movable member 1 side by side in the slide direction. The lubricant is supplied from a lubricant feeding device to each of the static pressure pockets 15 through the medium of the nozzle 61. The supporting force generated in the static pressure pockets 15 positioned on both ends in the slide direction out of the at least three static pressure pockets 15 is smaller than the supporting force generated in the other static pressure pocket 15. COPYRIGHT: (C)2009,JPO&INPIT
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