| 摘要 |
PROBLEM TO BE SOLVED: To provide a deposited film forming apparatus which can form a deposited film having highly uniform film thickness and film properties and few image defects with good productivity. SOLUTION: The deposited film forming apparatus is configured in such a way that both end parts of a cylindrical substrate (not shown in figure) are each electrically connected to a rotary stage (not shown in figure) being a standard grounding part of the deposited film forming apparatus so as to be grounded. An impedance regulating part 140 is provided between at least one end part of the both end parts of the cylindrical substrate and the rotary stage. The impedance regulating part 140 has a base material 141 constituted of an insulating material, a first conduction part 143 electrically connected to the end part of the cylindrical substrate, a second conduction part 144 electrically connected to the rotary stage, and a connection part 142 for electrically connecting both conduction parts 143 and 144. COPYRIGHT: (C)2009,JPO&INPIT
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