| 摘要 |
PROBLEM TO BE SOLVED: To provide a cooling trap unit equipped with a regeneration mechanism which shortens the regeneration time largely at the regeneration time when a condensed or solidified gas in a cooling panel is discharged to the outside of a cooling trap unit. SOLUTION: In the cooling trap unit 3 having a vacuum vessel 2 with a drain port 10, a refrigerator 1 connected to the vacuum vessel 2 so that an endothermic part 5 is located at the vacuum side and a cooling panel 7 to condense or solidify the gas, which is stuck and fixed to the endothermic part 5, it has a mechanism that a liquid is reservoired within the vacuum vessel 2 so that the liquid is brought into contact with the cooling panel 7 when the condensed or solidified gas in the cooling panel 7 is discharged to the outside of the vacuum vessel 2, thereby detecting the temperature change of the liquid by a temperature sensor 11 installed at the endothermic part 5 and then discharging the liquid from the drain port 10 on the basis of the detection signal representing that the temperature having reached a predetermined value. COPYRIGHT: (C)2009,JPO&INPIT
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