发明名称 |
Laser assisted nano deposition |
摘要 |
An apparatus and method is disclosed for forming a nano structure on a substrate with nano particles. The nano particles are deposited through a nano size pore onto the substrate. A laser beam is directed through a concentrator to focus a nano size laser beam onto the deposited nano particles on the substrate. The apparatus and method is suitable for fabricating patterned conductors, semiconductors and insulators on semiconductor wafers of a nano scale line width by direct nanoscale deposition of materials.
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申请公布号 |
US2009126627(A1) |
申请公布日期 |
2009.05.21 |
申请号 |
US20080231078 |
申请日期 |
2008.08.29 |
申请人 |
UNIVERSITY OF CENTRAL FLORIDA |
发明人 |
QUICK NATHANIEL R.;KAR ARAVINDA |
分类号 |
B05C5/00 |
主分类号 |
B05C5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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