发明名称 MANUFACTURING METHOD OF Co-BASE SINTERED ALLOY SPUTTERING TARGET FOR FORMING MAGNETIC RECORDING FILM OF LOW RELATIVE MAGNETIC PERMEABILITY
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method of a Co-base sintered alloy sputtering target for forming a magnetic recording film of low relative magnetic permeability. SOLUTION: In the manufacturing method of the Co-base sintered alloy sputtering target for forming the magnetic recording film of low relative magnetic permeability, Co-Cr-Pt alloy powder containing high Cr, Co-Cr-Pt alloy powder containing low Cr with less Cr content than that of the Co-Cr-Pt alloy powder containing high Cr, Pt powder and non-magnetic oxide powder are mixed so as to get the composition containing 0.5-15 mol% non-magnetic oxide, 4-20 mol% Cr, and 5-25 mol% Pt and the balance Co and inevitable impurities, and the mixture is pressure-sintered. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009108335(A) 申请公布日期 2009.05.21
申请号 JP20070278314 申请日期 2007.10.26
申请人 MITSUBISHI MATERIALS CORP 发明人 NONAKA SOHEI;KOMIYAMA SHOZO
分类号 C23C14/34;B22F1/00;B22F3/14;B22F3/15;C22C19/07;C22C27/06;C22C32/00;G11B5/851 主分类号 C23C14/34
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