| 摘要 |
PROBLEM TO BE SOLVED: To provide a grinder capable of grinding a workpiece to a predetermined depth without damaging the surface of the workpiece to be ground. SOLUTION: This grinder is used to grind the upper surface of the workpiece held on a chuck table. A control means performs a first pre-machining thickness measurement step for measuring the thickness (T1) of the workpiece before machining with a contact thickness meter, a second pre-machining thickness measurement step for measuring the thickness (T2) of the workpiece before machining with a non-contact thickness meter, a correction value calculation step for obtaining a correction value (T1/T2) for correcting a value measured with the non-contact thickness meter based on the thicknesses (T1)(T2) of the workpiece before machining, a grinding step for grinding the workpiece by operating the grinding means while measuring the thickness of the workpiece held on the holding surface of the chuck table by operating the non-contact thickness meter, and a grinding completing step for completing the grinding by the grinding means after a value obtained by multiplying the thickness (T0) of the workpiece measured with the non-contact thickness meter by the correction value (T1/T2) reaches a predetermined value. COPYRIGHT: (C)2009,JPO&INPIT
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