| 摘要 |
PROBLEM TO BE SOLVED: To make it possible for a sensor section for wafer detection arranged on a hand to smoothly transmit detected information to the side of a main body in a transport apparatus with the hand for wafer transport configured to rotate 180°. SOLUTION: The wafer transport apparatus 11 has the hand 14 supported to be rotatable through a rotating axis 21 against the main body 13. The hand 14 has a first optical fiber and a second optical fiber. The first end of the two optical fibers is arranged in a position to counter the main body 13 and in a symmetry position against the rotating axis 21. The second end is arranged so that it can emit light to a wafer mounted on a mounting section 19 and can receive reflected light for the wafer. In the main body 13, a light-emitting section 30 and a light-receiving section 31 are arranged at a position to counter the end surface of the first end of the two optical fibers under a condition that the hand 14 is arranged in a first status or in a second status. The wafer detection means detects a wafer based on the light-receiving amount of the light-receiving section 31. COPYRIGHT: (C)2009,JPO&INPIT
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