| 摘要 |
PROBLEM TO BE SOLVED: To inexpensively manufacture a calibration gas used for the calibration of a detector, when gas components generated from a sealing material of a gas supply valve is detected by the detector. SOLUTION: In a method for manufacturing a calibration gas used for the calibration of the detector, when gas components generated from a sealing material of a gas supply valve, is detected by the detector in gas-filling facilities, which fills a pressure vessel with a compressed gas supplied from a gas supply source via the gas supply valve, a fluorocarbon resin used for the sealing material or the sealing material made of a fluorocarbon resin is thermally cracked or brought into reaction with hydrogen, in a dry atmosphere, to acquire the calibration gas which contains at least carbonyl fluoride and does not substantially contain hydrogen fluoride. COPYRIGHT: (C)2009,JPO&INPIT
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