IN-LINE SUBSTRATE TREATMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an in-line substrate treatment apparatus suitably used for manufacturing a magnetic recording disk such as a hard disk. SOLUTION: First and second revolving mechanisms for revolving substrate holders 51 and 52 respectively are disposed along first and second endless conveying paths 1 and 2 to which a plurality of vacuum chambers containing a treatment chamber is connected, wherein the substrate holders 51 and 52 hold a substrate and the treatment chamber treats the substrate in vacuum. A conveying system is established so as to remove the substrate from the first substrate holder 51, convey the substrate in vacuum along a third conveying path 3 without sending it into the atmosphere and transfer the substrate to the second substrate holder 52. COPYRIGHT: (C)2009,JPO&INPIT