发明名称 SYSTEMS AND METHODS FOR PREPARATION OF EPITAXIALLY TEXTURED THICK FILMS
摘要 The disclosed subject matter relates to the use of laser crystallization of thin films to create epitaxially textured crystalline thick films. In one or more embodiments, a method for preparing a thick crystalline film includes providing a film for crystallization on a substrate, wherein at least a portion of the substrate is substantially transparent to laser irradiation, said film including a seed layer having a predominant surface crystallographic orientation; and a top layer disposed above the seed layer; irradiating the film from the back side of the substrate using a pulsed laser to melt a first portion of the top layer at an interface with the seed layer while a second portion of the top layer remains solid; and re-solidifying the first portion of the top layer to form a crystalline laser epitaxial with the seed layer thereby releasing heat to melt an adjacent portion of the top layer.
申请公布号 US2009130795(A1) 申请公布日期 2009.05.21
申请号 US20080275727 申请日期 2008.11.21
申请人 TRUSTEES OF COLUMBIA UNIVERSITY 发明人 IM JAMES S.
分类号 H01L21/36;C23C14/34;H01L31/18 主分类号 H01L21/36
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