发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a compact semiconductor device that has resistive elements capable of fine adjustment of resistance values. SOLUTION: A first resistive element R1 includes a first thin film F1 having a first sheet resistance. Multiple unit cells P of a second resistive element R2 series-connected to the first resistive element R1 are delimited by an identical rectangular shape to constitute a plane pattern, and include a second thin film F2 and an insulating portion IP. The second thin film F2 is provided to a first terminal region T1 positioned in a first rectangular corner section C1, to a second terminal region T2 positioned in a second corner section C2 diagonally opposed to the first corner section, and to a linear region connecting the first terminal region T1 and the second terminal region T2. The second thin film F2 has a second sheet resistance smaller than the first sheet resistance. The insulating portion IP is provided so as to include third and fourth rectangular corner sections C3 and C4. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009111265(A) 申请公布日期 2009.05.21
申请号 JP20070283923 申请日期 2007.10.31
申请人 RENESAS TECHNOLOGY CORP 发明人 SEKINE YASUSHI
分类号 H01L21/822;H01L27/04 主分类号 H01L21/822
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