| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device capable of avoiding durability deterioration of a light-receiving element or generation of noise due to the influence of radiation. SOLUTION: An X-ray line sensor 8 comprises a scintillator 31, which is arranged within a region R1 that is irradiated with X-rays K1, K2 from an X-ray irradiator 7 and converts a received X-ray into a light K3; an optical waveguide 33 for guiding the light K3, emitted from the scintillator 31 to a region R2 which is not irradiated with X-rays K1, K2; and a light-receiving element 32, arranged within the region R2 for receiving the light K3 guided by the optical waveguide 33. COPYRIGHT: (C)2009,JPO&INPIT
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