发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 A method for manufacturing a semiconductor device has preparation step of preparing a semiconductor substrate having a plurality of semiconductor chip formation regions and a scribe region arranged between the plurality of the semiconductor chip formation regions and including a substrate cutting position, a semiconductor chip formation step of forming semiconductor chips having electrode pads on the plurality of semiconductor chip formation regions, a first insulation layer formation step of forming a first insulation layer on the semiconductor chips and the scribe region of the semiconductor substrate, a second insulation layer formation step of forming a second insulation layer on the first insulation layer except for a region corresponding to the substrate cutting position, and a cutting step of cutting the semiconductor substrate at the substrate cutting position.
申请公布号 US2009127665(A1) 申请公布日期 2009.05.21
申请号 US20080273901 申请日期 2008.11.19
申请人 SHINKO ELECTRIC INDUSTRIES CO., LTD. 发明人 YAMANO TAKAHARU;MACHIDA YOSHIHIRO
分类号 H01L21/304;H01L23/58 主分类号 H01L21/304
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