METHOD OF CARBON NANOSTRUCTURES PREPARATION

摘要

FIELD: chemistry. ^ SUBSTANCE: invention refers to the methods of carbon nanostructures preparation such as carbon globules and carbon nanotubes of various forms which can be used in nanoelectronics as parts of electronic microcircuits and devices on their basis containing submicron working parts (nanotransistors, nanodiodes, nanokathodes). The method of carbon nanostructures preparation includes magnetron spraying of the carbon films with nanotubes on the substrate at direct current in vacuum chamber in the inert-gas atmosphere using the substrate designed with defined protruding surface asperities. Prior to magnetron spraying the catalyst in the form of the thin metal film is applied on the substrate. ^ EFFECT: preparation of various forms of nanotubes such as X-form and Y-form as well as globules of the vertically oriented nanotubes. ^ 9 dwg