| 摘要 |
A measurement apparatus (100) is configured to measure a position of an object to be measured using a plurality of signals representing the position of the object to be measured. The measurement apparatus (100) includes a distortion correcting part (2-1, 2-2, 2-3) which generates correction signals, a distortion coefficient arithmetic unit (11) which corrects and updates the distortion coefficient, a square-root of sum of squares arithmetic unit (3) which calculates a square-root of sum of squares of the plurality of correction signals generated by the distortion correcting part, a first normalizing part (4, 5-1, 5-2, 5-3) which generates a plurality of first normalized signals by dividing each of the correction signals by the square-root of sum of squares, and a phase arithmetic unit (6) which calculates the position of the object to be measured based on the first normalized signals calculated by the first normalizing part. |
