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发明名称
Halbleiterspeicherbauelement mit schwebendem Körper und Herstellungsverfahren desselben
摘要
申请公布号
DE602005006093(T2)
申请公布日期
2009.05.20
申请号
DE200560006093T
申请日期
2005.02.21
申请人
INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM (IMEC)
发明人
HASPESLAGH, LUC;ROSMEULEN, MAARTEN
分类号
H01L29/786;H01L21/336;H01L27/108;H01L27/12;H01L29/78
主分类号
H01L29/786
代理机构
代理人
主权项
地址
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