| 摘要 |
<p>A ZnO-based conductive film and a method for manufacturing the film having an acceptable moisture resistance in practical use, properties required for a transparent conductive film, and economical advantage are provided. [Means for Solving the Problems] A first ZnO conductive film layer 1, which includes ZnO as a main component and a Group III oxide as a dopant or includes ZnO as a main component and no Group III oxide, is formed on a surface of a substrate 11 and a second ZnO conductive film layer 2, which is transparent and includes a Group III oxide different to the Group III oxide included in the first conductive film layer is formed on the first ZnO conductive film layer to form a conductive film 10 having a multi-layer structure. The thickness of the first ZnO conductive film layer is 5 to 50 nm or less. Furthermore, the second and following ZnO conductive film layers include zinc oxide (ZnO) as a main component and a Group III oxide at a concentration of 7 wt% or less. The first ZnO conductive film layer is formed under a condition in which high crystallinity of the first ZnO conductive film layer can be obtained (for example, under heat treatment) so as to enhance the crystallinity of the second ZnO conductive film layer and following conductive film layers formed on the first ZnO conductive film layer.</p> |
