System and method for processing an object with a charged particle beam

摘要

A system and a method for processing and inspecting an object are provided, wherein the system comprises a particle beam column 26, an object holder 24 and a gas supply apparatus 28. Thereby, the object holder is formed comprising a base 20, a first table 21 displaceable relative to the base, a second table 22 displaceable relative to the first table and a third table 23 rotatable relative to the second table, wherein the cannula 30 of the gas supply apparatus 28 is fixed at the first table 21.