CERIUM OXIDE ABRASIVE AND METHOD OF ABRADING SUBSTRATES,申请号EP19970941287-传众专利搜索

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发明名称	CERIUM OXIDE ABRASIVE AND METHOD OF ABRADING SUBSTRATES
摘要
申请公布号	EP0939431(B1)	申请公布日期	2009.05.20
申请号	EP19970941287	申请日期	1997.09.30
申请人	HITACHI CHEMICAL CO., LTD.	发明人	YOSHIDA, MASATO;ASHIZAWA, TORANOSUKE;TERASAKI, HIROKI;KURATA, YASUSHI;MATSUZAWA, JUN;TANNO, KIYOHITO;OOTUKI, YUUTO
分类号	C09K3/14;B24B37/00;C09C1/68;C09G1/02;H01L21/304;H01L21/3105;H01L21/321	主分类号	C09K3/14
代理机构		代理人
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