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发明名称
SEMICONDUCTOR DEVICE AND PROCESS FOR PRODUCING THE SAME
摘要
申请公布号
EP2006894(A9)
申请公布日期
2009.05.20
申请号
EP20060714608
申请日期
2006.02.24
申请人
MITSUBISHI DENKI KABUSHIKI KAISHA
发明人
MINATO, TADAHARU;YAMAMOTO, HIDEKAZU
分类号
H01L21/322;H01L21/329;H01L21/331;H01L21/336;H01L29/739;H01L29/744;H01L29/78;H01L29/861
主分类号
H01L21/322
代理机构
代理人
主权项
地址
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