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发明名称
Verfahren zum Herstellen eines Flaschengrabens und eines Flaschengrabenkondensators
摘要
申请公布号
DE102005063468(B4)
申请公布日期
2009.05.20
申请号
DE200510063468
申请日期
2005.11.15
申请人
QIMONDA AG;INTERNATIONAL BUSINESS MACHINES CORP.
发明人
SETTLEMYER, KENNETH;RAMACHANDRAN, RAVIKUMAR;KIM, MIN-SOO;KWON, OH-JUNG
分类号
H01L21/8242;H01L27/108
主分类号
H01L21/8242
代理机构
代理人
主权项
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