AEROSOL CLEANING APPARATUS AND METHOD OF NANO-SIZED PARTICLE USING SUPERSONIC SPEED NOZZLE,申请号KR20070117299-传众专利搜索

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发明名称	AEROSOL CLEANING APPARATUS AND METHOD OF NANO-SIZED PARTICLE USING SUPERSONIC SPEED NOZZLE
摘要
申请公布号	KR20090050707(A)	申请公布日期	2009.05.20
申请号	KR20070117299	申请日期	2007.11.16
申请人	POSTECH ACADEMY-INDUSTRY FOUNDATION	发明人	LEE, JIN WON;LEE, MI JEONG
分类号	H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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