| 摘要 |
<p>The chamber (4) has an arc formation chamber (11) defined by flanges (12, 13), and a gas evacuation unit evacuating gas generated during formation of an electric arc, where the flanges (12, 13) are made of ceramic material and gasogene organic material, respectively. The unit has an evacuation pipe (31) that is arranged behind the flange (13) and is connected to an exchange space. Permanent magnets have magnetized portions (33, 43, 52) that are arranged behind the flange (12). The unit has an opening partially formed in the flange (13) and is projected from the chamber (4).</p> |
