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经营范围
发明名称
SUBSTRATE INSPECTING APPARATUS
摘要
申请公布号
KR20090051098(A)
申请公布日期
2009.05.20
申请号
KR20097005651
申请日期
2009.03.19
申请人
OLYMPUS CORPORATION
发明人
JOGASAKI SHUYA
分类号
G01N21/89;G01B11/02;G01N21/958
主分类号
G01N21/89
代理机构
代理人
主权项
地址
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