发明名称 Memory structure with high coupling ratio
摘要 A memory structure comprising a plurality of memory cells is described. Each memory cell comprises a substrate, a shallow trench isolation, a spacer, a tunnel oxide, and a floating gate. The shallow trench isolation in the substrate is used to define an active area. The spacer is at the sidewall of the shallow trench isolation and is higher than the shallow trench isolation. The tunnel oxide is on the active area. The floating gate is on the tunnel oxide.
申请公布号 US7535050(B2) 申请公布日期 2009.05.19
申请号 US20050272683 申请日期 2005.11.15
申请人 PROMOS TECHNOLOGIES INC. 发明人 CHUNG CHIH-PING;LIN CHUN-NAN;CHEN CHUNG-YI;LIAO HUNG-KWEI
分类号 H01L29/94 主分类号 H01L29/94
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