发明名称 Interface for testing semiconductors
摘要 A system includes an imaging device suitable for effectively positioning a probe for testing a semiconductor wafer. The system includes an objective lens for sensing the device under test and an imaging device sensing a first video sequence including multiple frames of an overlapping region of the device under test. A video signal is provided to a display including multiple frames of the overlapping region of the device under test. An operator indicating a region of the video signal of devices under test and the system in response presenting an enlarged view of a plurality of different regions of the device under test in a plurality of windows free from user input, where the region and the plurality of different regions are simultaneously displayed on the display.
申请公布号 US7535247(B2) 申请公布日期 2009.05.19
申请号 US20060335037 申请日期 2006.01.18
申请人 CASCADE MICROTECH, INC. 发明人 ANDREWS PETER;HESS DAVID;NEW ROBERT
分类号 G01R31/00 主分类号 G01R31/00
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