发明名称 Stress sensitive element
摘要 A stress sensitive element includes a vibrating arm having an electrode, a beam portion integrated with the vibrating arm at both ends of the vibration arm, and a connecting portion interposed between the beam portion and the vibrating arm. The element is placed by providing a fixing portion to one of the connecting portion and the beam portion, and an extending direction of the vibrating arm is orthogonal to a stress direction to be detected.
申请公布号 US7535158(B2) 申请公布日期 2009.05.19
申请号 US20070000637 申请日期 2007.12.14
申请人 EPSON TOYOCOM CORPORATION 发明人 WATANABE JUN
分类号 H01L41/08 主分类号 H01L41/08
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