| 摘要 |
A method, system and apparatus are presented for real time analysis of images in a focused beam system. In various embodiments, marker positions are displayed as graphical elements on the image of a sample being processed. Selected characteristics of all or a portion of the pixels in the image are used to determine the positions. The marker positions are used to detect the occurrence of an event such as an endpoint. In some embodiments attributes of the of the graphic elements change based on the occurrence of selected events and in further embodiments an action is initiated.
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