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发明名称
PLASMA PROCESSING APPARATUS
摘要
申请公布号
KR20090050007(A)
申请公布日期
2009.05.19
申请号
KR20080112882
申请日期
2008.11.13
申请人
TOKYO ELECTRON LIMITED
发明人
YAMAZAWA YOHEI;OKUNISHI NAOHIKO
分类号
H05H1/24;H05H1/30;H05H1/34
主分类号
H05H1/24
代理机构
代理人
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