发明名称 Vertical carbon nanotube transistor integration
摘要 A hybrid semiconductor structure which includes a horizontal semiconductor device and a vertical carbon nanotube transistor, where the vertical carbon nanotube transistor and the horizontal semiconductor device have at least one shared node is provided. The at least one shared node can include, for example, a drain, source or gate electrode of a FET, or an emitter, collector, or base of a bipolar transistor.
申请公布号 US7535016(B2) 申请公布日期 2009.05.19
申请号 US20050906016 申请日期 2005.01.31
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 FURUKAWA TOSHIHARU;HAKEY MARK C.;HORAK DAVID V.;KOBURGER, III CHARLES W.;MASTERS MARK E.;MITCHELL PETER H.
分类号 H01L29/15;H01L51/30 主分类号 H01L29/15
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