发明名称 Control method, temperature control method, adjustment method, temperature controller, program, recording medium and heat treatment device
摘要 When a work is set on a hot plate and a heat treatment is started and the like, an addition waveform of a target temperature is formed based on a previously formed data of an adjustment value, and a temperature is controlled by adding the addition waveform to the target temperature SP, and with the data of the adjustment value, the variation in temperature of the work is prevented using an interference matrix showing a relation between the target temperature SP and the temperature of the work.
申请公布号 US7536230(B2) 申请公布日期 2009.05.19
申请号 US20060476198 申请日期 2006.06.28
申请人 OMRON CORPORATION 发明人 NANNO IKUO;YAMADA TAKAAKI;TANAKA MASAHITO;IWAI YOSUKE;WAKABAYASHI TAKESHI
分类号 G05B13/02 主分类号 G05B13/02
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