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发明名称
CHEMICAL MECHANICAL POLISHING METHOD
摘要
申请公布号
KR20090049779(A)
申请公布日期
2009.05.19
申请号
KR20070116069
申请日期
2007.11.14
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
LIH, YOUNG JAE;JEONG, JU YOUNG
分类号
H01L21/304;B24B37/005;B24B37/04
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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