| 摘要 |
A method to reduce parasitic mutual capacitances in embedded passives. A first capacitor is formed by first and second electrodes embedding a dielectric layer. A second capacitor is formed by third and fourth electrodes embedding the dielectric layer. The third and first electrodes are etched from a first metal layer. The fourth and second electrodes are etched from a second metal layer. The first and the fourth electrodes are connected by a connection through the dielectric layer to shield a mutual capacitance between the first and second capacitors. |
