| 发明名称 |
Metal nanoline process and applications on growth of aligned nanostructure thereof |
| 摘要 |
A metal nanoline process and applications on growth of aligned nanostructures thereof. A nano-structure is provided with a substrate with at least one nanodimensional metal catalyst line disposed thereon and at least one carbon nanotube or silicon nanowire extending along an end of the metal catalyst line.
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| 申请公布号 |
US7535081(B2) |
申请公布日期 |
2009.05.19 |
| 申请号 |
US20040968891 |
申请日期 |
2004.10.21 |
| 申请人 |
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE |
发明人 |
LAI MING-JIUNN;WEI JENG-HUA;WANG HUNG-HSIANG;LO PO-YUAN;KAO MING-JER |
| 分类号 |
H01L29/06;B01J23/74;B01J37/02;C01B31/02;H01L21/44;H01L21/768;H01L51/00 |
主分类号 |
H01L29/06 |
| 代理机构 |
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