发明名称 SEMICONDUCTOR MANUFACTURING APPARATUS, METHOD FOR MANUFACTURING APPARATUS OPERATION PARAMETER, AND PROGRAM
摘要 <p>A process information managing device including recipe storage units that store two or more recipes which comprise information about a process maintained by two or more control devices, and correspond to the two or more control devices, respectively, a receiving unit that receives process parameter information that is information about process parameters included in the two or more recipes, a recipe information obtaining unit that searches for a recipe in the recipe storage unit by using the process parameter information and obtains recipe information that is information about the found recipe, and an output unit that outputs the recipe information obtained by the recipe information obtaining unit makes it possible to easily determine the one or more recipes affecting a change in the process parameters.</p>
申请公布号 KR20090049599(A) 申请公布日期 2009.05.18
申请号 KR20097004895 申请日期 2008.03.18
申请人 TOKYO ELECTRON LIMITED 发明人 KANAYA NORIAKI;ASAKAWA KOKI;IIJIMA KIYOHITO;HIROSE MASAYUKI
分类号 H01L21/00 主分类号 H01L21/00
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