| 摘要 |
A thermo-compression bonding tool (3) has a body block (6) and a heater block (22), on the lower surface side of which a tool section (29) is provided and the upper side of which is attached to the body block with a adjustment mechanism (21) in between, the adjustment mechanism adjusting the flatness in the longitudinal direction of the tool section. The heater block (21) is formed from a material having a thermal expansion coefficient less than that of the body block. |
