MAGNETIC DRIVING MEMBER, SUBSTRATE TRANSFERRING UNIT AND SUBSTRATE TREATING APPARATUS USING THE SAME

摘要

The invention provides a magnetic driving component which adopts a direct driving mode, can simplify the structure of a driving mechanism and can transmit substrates more stably, and a substrate processing device which makes use of the substrate transmit unit of the magnetic driving component and is provided with the substrate transmit unit. The substrate transfer unit of the transfer substrate comprises the following parts: axes which are deployed side by side and are used for transmitting the substrate; a first magnetic component which is arranged in the end of the axis; a second magnetic component which is opposite to the first one, carries out the magnetic coupling and forms a plurality of protrusions along the circle surface; a power transfer component which transfers the transgenic power between the second magnetic component by meshing any two adjacent protrusions; and a driving component which offers transgenic power to any second magnetic component.