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发明名称
Inkjet patterning using plasma surface treatment
摘要
申请公布号
KR100898128(B1)
申请公布日期
2009.05.18
申请号
KR20070076253
申请日期
2007.07.30
申请人
发明人
分类号
H01L21/027;G03F7/20
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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