SINGLE-POLARIZER FOCUSED-BEAM ELLIPSOMETER,申请号KR20070115398-传众专利搜索

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发明名称	SINGLE-POLARIZER FOCUSED-BEAM ELLIPSOMETER
摘要
申请公布号	KR20090049226(A)	申请公布日期	2009.05.18
申请号	KR20070115398	申请日期	2007.11.13
申请人	KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE	发明人	CHO, YONG JAI;CHEGAL, WON;CHO, HYUN MO
分类号	G01B11/06;G01B11/00;G01N21/00;G01N21/41	主分类号	G01B11/06
代理机构		代理人
主权项
地址

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